Success Stories

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Smarter Wafer Transfer Machine

 

In the ever-evolving world of semiconductor manufacturing, wafer handling automation plays a crucial role in maximizing efficiency and minimizing contamination. At the heart of this process is the wafer transfer machine, responsible for moving delicate silicon wafers between cassettes with precision and reliability. While the mechanical design is essential, it’s the software behind these machines that drives true intelligence.

 

Our client turned to us to implement the software that would act as the brain of the machine which is the layer that connects the mechanical components to the factory floor, enables real-time control, and ensures smooth operation across various scenarios. What followed was a tightly integrated collaboration that resulted in a high-performance wafer transfer machine now successfully running in a live production fab.

 

 

The core challenge lay in building a fully automated system capable of handling multi-slot wafer transfers between cassettes, while providing seamless integration with the fab's host system via SECS/GEM communication protocols. At the same time, the client needed a user-friendly interface that would give operators full visibility and control, and a robust data architecture to manage the real-time flow of commands, sensor data, and alarms.

 

We approached the project by developing a layered software architecture that cleanly separated machine control, supervisory logic, user interaction, and host communication. At the foundation, we implemented a real-time control system on the PLC, handling everything from robotic motion and wafer presence detection to safety interlocks and cassette positioning. This PLC layer served as the execution core, responsible for the precise and reliable operation of all mechanical movements.

 

The user interface was designed with operational clarity in mind. We delivered a clean graphical UI that allowed operators to visualize cassette status, view wafer slot maps, and respond to alarms quickly. Manual wafer jog controls, and live system diagnostics, allowing both operators and engineers to interact with the system in a powerful yet intuitive way.

 

SECS/GEM communication was implemented in full compliance with SEMI standards, enabling the machine to connect directly to the fab’s host system. Through this interface, the host could issue commands such as start, stop, and abort, while also receiving automatic updates on wafer transfers, machine state changes, alarms, and variable reports. This ensured full integration with the factory’s host and automation systems without any need for custom middleware or translation layers.

 

A key architectural focus was enabling smooth and reliable data flow between all layers of the system. Data flowed upward from the PLC to the PC layer and UI which including sensor readings, wafer presence data, and machine status. At the same time, commands and recipes flowed downward from the host and operator interface to the control layer. This bi-directional architecture ensured every part of the system stayed synchronized and responsive.

 

This success story is a clear example of why software truly is the brain behind the machine. When built with clarity, standards, and long-term flexibility in mind, software becomes the key enabler for high-performance wafer automation in the semiconductor industry.